• A vendor or large manufacturing entity will be need to act as the FEL facility integrator

– Integrator will bring multiple independent sources together for FEL construction, previously, government labs held this role

– Most FEL equipment has been commercialized:

• undulator, vacuum equipment, RF systems, cryomodules, cryogenic plant

– Specialized manufacturing will revolve around the FEL configuration and injector/electron gun assembly

– Research Labs will provide key information regarding FEL construction and operation and will quite possibly play a critical role in daily FEL operation

• Each customer site will bring its unique set or requirements and the first generation of machines after a demo will only be a few (x2 at each site though). FELs inherently lend themselves to flexible requirements.

– ASML will need to ensure FEL integration with NXE tool series