CAS No. 75-59-2/10424-65-4 Tetramethyl ammonium hydroxide aqueous TMAH-238



Typical Properties

CAS No.

75-59-2/10424-65-4

Chemical formula

(CH3)4NOH·5H2O

Appearance

Colorless transparent liquid

Specific Gravity @ 20

1.021

Item

Unit

Min

Max

Assay

%

2.378

2.382

Color

Hazen

 

5

CO32-     (Carbonate)

ppm

 

80

Cl-       ( Chloride )

ppm

 

0.1

CH3OH (Methanol)

ppm

 

40

Li (Lithium)

ppb

 

5

Na (Sodium)

ppb

 

10

Mg (Magnesium)

ppb

 

5

Al (Aluminum)

ppb

 

10

K (Potassium)

ppb

 

10

Ca (Calcium)

ppb

 

10

Cr (Chromium)

ppb

 

5

Mn (Manganese)

ppb

 

5

Fe (Iron)

ppb

 

5

Ni (Nickel)

ppb

 

5

Co (Cobalt)

ppb

 

5

Cu (Copper)

ppb

 

5

Zn (Zinc)

ppb

 

5

Mo (Molybdenum)

ppb

 

5

Cd (Cadmium)

ppb

 

5

Pb (Lead)

ppb

 

5

Ag (Silver)

ppb

 

5

Particle >0.5um

Ea/ml

 

100

Application

 -Brightener cleaner and touch cutting agent for computer silicon wafer surface during the production of silicon wafer.

 -Widely used in electronic industry, especially as positive resister developer, silicon wafer wet etchant and super clean solution for CMP process. Also used in the manufacture of integrated circuits, liquid crystal displays, printed circuit boards, capacitors, sensors, and many other electronic components.

Storage and handling

 -Available in 25 kg/barrel

 -Store products in tightly closed original containers at 5-40

 -Shelf life: 12 months from delivery date

 -According to non-dangerous goods transport


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