Compact Spin Coater 3 Vacuum Chucks & Vacuum Pump

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  • Certificate CE ROHS Certificate

Compact Spin Coater 3 Vacuum Chucks & Vacuum Pump


VTC-100A is a compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4"

The spinning speed is variable from 500-8000 rpm with two programmable segments. 

The package comes included with complete accessories for immediate use


Structure
                   

Aluminum casting case to keep spinning stable

Liquid disk made to resist most of the corrosive solutions

Drainage outlet and vacuum pump connector are on back panel

One filter is included in standard package. It is used to connect thecoater

for preventing waste water flowing into the pump

One oil-less vacuum pump is included in the standard package


Chamber  & Vacuum Chuck 

Chamber Diameter: 145 mm

3 sets of PP anti-corrosive vacuum chucks with chuck o-ring come in 

different  sizes (1'', 2'' and 4'')

1 piece of adhesive tape (6'' W x 24'' L) is included  for coating 

irregularly shaped substrates (e.g. Place the irregular substrate on the adhesive 

tape,then the vacuum chuck will hold the tape by suction)

Mini suction cups are available for the small wafer with less 1" Dia. 

or substrate with regular ( 5x5, or 10x10mm) or irregular shape. 

Vacuum Pump

Vacuum grade rubber pipe is included for immediate use


Spin Speed & Time 
 

Digital control panel with TWO programmable segments for different 

spin times and speeds.

Spinning speed: 500 - 8000 RPM  

Spinnning Time: 1 - 60s

Liquid Injecting

20mL syringe is used to contain the coating material

The syringe holder height can be adjusted and rotated freely along the 

support rod 

Input Power

 220VAC please select the voltage in options bar (10A fuse)

Motor Power

24V DC motor  with 150W Max

Product Dimensions

13''(L) x 10''(W) x 8.5''(H)

Net Weight

15 kg (33 lbs)

Compliance

 CE Certified

Warranty

One year limited with lifetime support

Rusting and damage due to improper storage condition or maintenance are not 

covered by warranty

Shipping Weight

 46 kg (100 lbs)


Application Notes

In order to achieve optimal coating quality, please consider cleaning 

substrates by a plasma cleaner prior to coating. 

This will significantly reduce the surface tension on the substrates. 

Cleaning instruction for the spin coaters.

Strongly suggest you put the coater under a fume hood as below right

When using the coater in glovebox with Ar gas, vacuum pump must 

put in outside the glovebox via vacuum feedthrough or adaptor

Warnings

Do not overflush the water bowl/base with any kinds of liquid. 

Excess liquid will leak into the motor shaft and cause damage. 

Please use fabric cloth to wipe out the residues remain in the bow/base.

If necessary, turn on the water outlet when flushing the water bowl/baseto 

avoid liquid overflowing during the operation.

Shipping Dimensions

40"(L) x 28"(W) x 24"(H)

Shipping Weight

46 kg (100 lbs)

Compact Spin Coater

Compact Spin Coater

Coin Cell Line

Cylindrical Cell Line

Pounch Cell

   

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