RF-300I-LD is a compact 300W auto-match RF generator with 13.56Mhz frequency, which integrated auto-matching network together with 13.56 MHz RF Generator into one unit and made installation and operation much easier. It can be operated with MTI magnetron sputtering source to DIY a small RF film coater at a flexible budget.
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Input Power
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220VAC, 50/60Hz or 110VAC, 60Hz selectable
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RF Power Generator
with auto-matching
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1, Output Power: 5 -300W adjustable with ± 1% stability
2, RF frequency: 13.56 MHz ±0.005% stability
3, Matching: Automatic with variable air capacitor
4, Cooling: Air cooling
5, Noise: <50 dB
6, Power: 110 -240VAC, 50/60Hz
7, Dimension: 400 W x 450 D x 80 H, mm
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Optional Accessories
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1, You may order 2" High Vacuum Magnetron Sputter Source For DIY RF & DC Sputtering Coater together with RF power supply for immediate use
2, High Vacuum Quick Disconnect is included when you order 300W RF generator together with the 2" sputtering source.
3, High Vacuum Quick Disconnect with 0.75" ID (compatible with HVMSS-SPC-2). Use this component to install the HVMSS-SPC-2 sputtering tool onto the baseplate (up to 1” thick) of a vacuum chamber with 1” diameter through-hole
4, Digital Temperature Controlled Circulating Water Chiller with 6 Liters Tank, 16L / min Flow is available at extra cost, please order separately.
5, 148 cm RF cable is recommended with extra cost
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