Lab CVD System with 1500-1500C Dual Zone Rotary Tube Furnace

Sales Manager: Andrea

Email: Andrea@tmaxlaboratory.com

Wechat: 18250801164


  • Warranty Two years limited warranty with lifetime technical support
  • Certificate CE, IOS, ROHS, SGS, UL Certificate

Lab CVD System with 1500-1500C Dual Zone Rotary Tube Furnace

The CVD system consists of gas supply system + tube furnace + vacuum system, and the maximum temperature can reach 1200 degrees, 1400 degrees, 1600 degrees, and 1700 degrees. The heating zone can be single temperature zone, dual temperature zone, three temperature zone, etc. The ultimate vacuum can reach 10-3Pa. The gas supply system can be mass flowmeter or float flowmeter for flow regulation. The number of mixing channels can be 2 channels, 3 channels, 4 channels, and 5 channels.


Detailed technical parameters

Model

              1500-1500-I                                                     1500-1500-II

Power

                  9KW                                                                   9KW

Tube size

        Dia 60(OD) X1400 mm                                     Dia 80(OD) X1400 mm

Supply voltage

              380V                                                                       380V

Phase

             dual phase                                                              dual phase

Tube

      Corundum tube: high purity AIO ceramics (including) 99.5%

Heating element

First temperature zone:silicon carbon rod                     Second temperature zone: silicon carbon rod

Furnace tube rotation speed

With stepless variable speed motor, the speed can be adjusted between (1-25 RPM)

Motor power

                                                        40W

The furnace can be tilted at an Angle

                                              0-30degree

Kind of drive

                                        Toothed belt and gear

Control mode

UAV program temperature control instrument (standard)

1, 30-stage program temperature control intelligent PID adjustment.

2. With over-temperature protection, the electric furnace heating circuit is automatically cut off when the temperature is over-temperature or broken, (when the electric furnace temperature exceeds 1520 degrees or the thermocouple is blown, the AC relay on the main circuit will be automatically disconnected, the main circuit is broken. On, the ON light on the panel is off, the OFF light is on, and the limited protection electric furnace).

3, with 485 communication interface (standard when purchasing software)

4, with power-off protection function, that is, when the power is turned on after the power is turned off, the program does not start from the starting temperature, but the furnace temperature rises from the time of power failure.

5, the meter has the function of temperature self-tuning

(you need to pay extra for the replacement of imported instruments, optional)

                              

FP93 instrument                                  EUROTHERM instrument                              Touch screen instrument

(shimaden, Japan)

Furnace material


1. High quality high purity alumina polycrystalline fiber curing furnace formed by vacuum filtration.

2. Adopt Japanese technology for molding.

Control accuracy

                                                      +/- 1℃

Trigger

                                               Phase-shifted trigger

Electric appliance

                                                  Zhejiang chint

Silicon controlled

                                             106/16ESEMIKRON

The highest temperature in the first and second temperature zones

                                                  1500℃

Rated temperature in the first and second temperature zones

                                                 1400℃

Heating rate

                        ≤20℃/ Min(it can be modified as required)

Recommended rate of temperature rise

                                                  ≤10℃/ Min

Thermocouple

S typein the first temperature zone                                      S typein the second temperature region

Length of heating section in the first and second temperature zones

  300+300mm                                             300+300mm

Constant temperature length

 450mm                                                        450mm



Gx-3 three-channel air supply (mixed air) system

 1.1. The gas exits the cylinder, is depressurized through a pressure reducing valve, passes through the PTFE tube to the inlet of the gas supply system, and then passes through the mass flow meter to control the gas flow, and then passes through the gas mixing tank and then enters the furnace inlet.

1.2. A pressure gauge is attached to the gas mixing tank, and the pressure gauge display disk and the proton flowmeter controller are installed on the same panel.

1.3. Each gas line has a high pressure shut-off valve for safety.

1.4. The gas path adopts a high-precision gas mass flow meter, and the inside of the gas path is entirely made of stainless steel pipe, which has good corrosion resistance.

1.5. All the joints in the box are connected by stainless steel ferrules, which have good air tightness and high pressure resistance.

      

2. Technical parameters:

Pneumatic channel: 3

Gas flow control: mass flow meter.

Cabinet dimensions: 600X600X600mm

Mass flowmeter technical parameters:

     Interface: Φ6

     Display: LED

     Working environment temperature: 5~45°C

Flow controller: Proton flow controller parameters Please check back

Stainless steel tube: Φ6 outside X Φ4

Pressure vacuum table: -0.1~0.15 MPa, 0.01 MPa/division

Stop valve: Φ6

Flow control: PLC intelligent control  

 

3. Mass flowmeter technical parameters:

Product Name: Mass Flow Controller

Product Description : Normal type, analog circuit

Product details: Ordinary, analog circuit, rubber seal, tubular shunt, not easy to block.

Main indicators: Range: 5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10 SLM (you can choose the range arbitrarily)

• Accuracy: ±1% F.S

• Linear: 0.5% F.S

• Repeatability: ±0.2% F.S

• Response time: 1S

• Air pressure drop: <0.01MPa

• Maximum pressure: 3MP

• Working environment temperature: 5~45°C

• Input and output signals: 0~+5.00V

• Power: +15V 50mA -15V 50mA

• Dimensions: 158*30*110

• Weight: 0.9 Kgg

 

4. Configuration of the gas supply system:

    1. Proton flowmeter: 3

    2. Mechanical pressure gauge (range -0.1~0.15MPa): 1

    3. Stainless steel cut-off valve: 4

    4. Stainless steel plate joints: 4

    5. Stainless steel valve connector: 2

    6. Stainless steel cylinder connector: 3

    7. PTFE tube: 15M

    8. Mixing tank Dia80X140MM: 1

    9. Furnace rack: 1 set




VS High Vacuum System

Molecular pump unit

(Option 1 or option

2)


Unit input voltage

380V /220V

Bellows

KF40X1000

Vacuum baffle valve

KF40

Dimensions

600X600X600

molecular pump

 

(Option 1) 

Model

FJ620

input voltage

380V

Inlet flange

DN160

Pumping rate L/S (to air)

600

ultimate pressure(Pa)

6×10-7

type of cooling

water-cooling

cooling water pressure(MPa)

0.1-0.2

cooling water temperature

<25℃

environment temperature

0~40℃

Recommended starting pressure

<100pa

Fore-stage vacuum pump TRP-24 of molecular pump

(FJ620 molecular pump must be equipped with previous pump)

(Option 2

功率

0.75KW

电压

380V

转速

1450rpm

·        Inlet Diameter

KF25/KF40

Pumping rate of front engine(L/S)

6

Ultimate pressure

4X10 -2Pa

Germany Pfeiffer vacuum pump

(Option 2)

 

voltage

220V

power

110W

Extraction interface

KF40

weight

150KG

Pumping speed of front engine

0.9m 3/ h

pumping rate(N2)

33L/S

      composite vacuum gages

 

model

ZDF

power supply

220V   55W

control accuracy

± 1%

Vacuum gauge measuring range

10-5 -10 5 Pa

PECVD




 Tmax CE

 TMAX Partner

CVD furnace


tube furnace


muffle furnace



1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.




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