Product features
The sensor is highly sensitive and has minimal initial flow.
Label type installation, compact structure.
Multiple output.
The sensor has high zero stability.
All measuring ranges are high stability ,accuracy and excellent repeatability.
Low power consumption, low pressure loss.
Mechanical dimensions
Technical parameters
|
Parameters
|
FS5001L
|
Unit
|
|
Flow range
|
200,500,1000
|
4000,6000
|
sccm
|
|
Measuring proportion
|
100:1
|
|
|
Precision
|
±(2.0+0.5FS)
|
%
|
|
Repetitive
|
0.5
|
%
|
|
Zero output drift
|
±30
|
mV
|
|
Output drift
|
±0.12
|
%/°C
|
|
The response time
|
10(default,5,10,20,50,100,200,500,1000 can be set up)
|
ms
|
|
Working power
|
8~24VDC,50mA
|
|
|
Output way
|
Linear:1²Canalog voltage0.5~4.5VDC
|
|
|
Maximum working pressure
|
≤0.5
|
MPa
|
|
Working temperature
|
-10+55
|
°C
|
|
Storage temperature
|
-20+65
|
°C
|
|
Working humidity
|
<95%RH(no ice,no frost)
|
|
|
Calibration mode
|
Air(20°C,101.325kPa)
|
|
|
Maximum allowable flow
|
3
|
18
|
SLPM
|
|
Maximum allowable flow change
|
500
|
3000
|
Sccm/sec
|
Remark:The above parameters at 20 ° C, 101.325 kPa measured.
Product selection
*The unit of maximum flow is SCCM,for example 500 represents maximum flow of 500SCCM;
For carbon dioxide, the maximum flow can be 200,500,750 (no option 1000) and 4000 (no option 6000).
**.The standard output of the sensor is analog voltage, and 1²C is the option.
