Technical parameters
|
Parameter
|
MFC1000-100sccm
|
MFC1000-1000sccm
|
MFC1000-20SLPM
|
Unit
|
|
Flow range
|
100sccm
|
1000sccm
|
20SLPM
|
|
|
Precision(Under calibration condition)
|
±(1.5+0.5FS)
|
%
|
|
Repetitive
|
±0.5
|
%FS
|
|
Zero drift (full range drift)
|
0.05
|
%FS/year
|
|
Working range/Span ratio
|
100:1
|
100:1
|
|
Maximum controllable flow
|
102
|
%FS
|
|
Typical response time
|
100
|
ms
|
|
Starting preheating time
|
70
|
ms
|
|
Working temperature
|
0～+50
|
℃
|
|
Slow range pressure loss (exhaust to atmosphere)
|
150
|
800
|
2000
|
Pa
|
|
Size
|
63.5x66.5x22.2
|
70.5x74.2x26.0
|
mm³
|
|
Pipe connection interface
|
1/8＂NPT (nut)
|
3/8＂NPT(nut)
|
|
Remark:Temperature drift:The error increases by 0.12% for every 1 ℃ difference from the calibrated temperature of 20℃.
Mechanical dimensions
