Product name：XY micro linear positioning platform miniature square linear motor stage for semiconductor equipment
Characteristic:
1. Fast response, higher acceleration (up to 25G) and shorter settling
time, increase production efficiency.
2. High speed, up to 5m/s, reduce the production cycle.
3. High rigidity, direct drive load, no need for mechanical
transmission such as gears, belts, ball screws etc.
4. High accuracy, direct measurement system, no distance/Angle
conversion required.
5. No backlash, directly coupled power driven load, no mechanical
conversion.
Motor and Stage Specifications
|
Model：
|
LMA65-10-XXX-A
|
G01
|
Grating feedback, resolution: 0.1μm
|
G05
|
Grating feedback, resolution: 0.5μm
|
Motor specifications
|
|
Units
|
Value
|
Continuous Force (Tmax）
|
N
|
3.5
|
Peak Force
|
N
|
24.5
|
Motor Constant
|
N√W
|
1.82
|
Max.Continuous Power Dissipation
|
W
|
3.68
|
Continuous Current (Tmax）
|
Arms
|
0.6
|
Peak Current (1S)
|
Arms
|
4.2
|
Force Constant (25℃，±5%）
|
N/Arms
|
5.8
|
Back EMF Constant (25℃，±5%）
|
Vrms/m/s
|
1.9
|
Electrical Resistance(25℃，±5%）P-P
|
Ω
|
4.87
|
Inductance(25℃，±20%）P-P
|
μm
|
0.1
|
Max Coil Temperature
|
℃
|
120
|
Polar Distance (N-N) (360℃ Electrical cycle)
|
mm
|
36
|
Magnetic Attraction
|
N
|
67
|
Stage specifications
|
|
Units
|
Value
|
Max. Load
|
kg
|
2.4
|
Effective Stroke
|
mm
|
10
|
Resolution
|
μm
|
0.1
|
Max.Speed（1）
|
mm/s
|
270
|
Repeat accuracy
|
μm
|
±0.5
|
Weight
|
kg
|
0.25
|
|
Working environment temperature
and humidity
|
0-40℃、20-80%RH
|
Installation dimensions
Appliaction Case
Assembly into XY cross stage and applied in wire bonder.
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Packaging & Delivery
Packaging Details.: plywood packing
Port.: Shenzhen ( Sea / Air shipping, TNT, UPS, FedEx and DHL ect.)
Leading time: According to the order quantity, 10 days for the small order and 20 days for the bulk order
