Model

TOB-DSP-1200℃-PECVDS

Turning type vacuum tube furnace

Power

3.5KW

Furnace tube size(mm)

Dia 60(OD) X1200mm

Dimension

1300X420X1200

Power supply voltage

220V

Phase number

Single-phase

Temperature control mode

Yudian temperature control

30 sections can only use PID temperature regulation.

FP93 temperature control (from Japan)

(Replace imported instruments, for an additional fee)

1,40 section program temperature control can be divided into 4,2,1 group program,

 if the program is divided into four groups, each program segment 10,

2,6 group PID control, low, medium and high temperature can each with a set of PID, 

such that each segment is capable of controlling the temperature is very accurate.

Trigger

Phase-shift trigger

SCR

106 / 16E Germany Simon Kang

Max temperature

1200 ℃

Rated temperature

1100 ℃

Heating rate

≤30 ℃/ Min (Available upon request modification)

Control accuracy

+/- 1 ℃

Recommended heating rate

≤15  ℃/ Min

Heating length

400mm

Thermocouple Type

K type

Certification

CE

Surrounding surface temperature

≤45℃

Turn the motor power

40W

Electric putter power

40W

Furnace can be tilted angle

-10 ~30 degrees

Tube rotation rate

Continuously variable motor speed can be adjustable in 1-25 rev / min

Plasma RF Power

Power output range

0-500W

Maximum reflected power

10W

Signal frequency

13.56MHZ ± 0.005%

Noise

<30 dB

Air cooling

cooling method

Input Power

208-240V 50 / 60HZ

GX supply system

 main parameters

Standard range

Proton flow controller 5,10,20,30,50,100,200,300,500SCCM,

 1,2,3,5,10SLM 

(you can choose any scale)

Accuracy

± 1.5%

Pressure drop

<0.01MPa

Repeatability

± 0.2% F.S

Max

Operating pressure

3MP

VS-0.1 exhaust system

power supply

220V / 380V 380W

Pumping rate

2L / S

Resistance vacuum gauge

ZDR-I

Vacuum measurement range

0.1-10 5 Pa

Vacuum pump

VRD-8

Corrugated pipe

KF25X1000mm

Vacuum system

10 -1Pa